System Enlargement Technology

Machining tool and clean room for large size vacuum equipment for the next generation are introduced here. As our company philosophy we have been aggressively investing in reinforcing latest machining facilities which are needed for production of the large size vacuum equipment,

Ultra Large Size Five-face Machining Tool

Ultra Large Size Five-face Machining Tool

Large size machining tool RB-7VM
With this ultra large five face machining center, work range of X:8250, Y:4500 and Z:2500 is realized. We established machining production system with high accuracy and high efficiency.


Clean Room for Ultra Large Equipment of the Next Generation

Clean Room for Ultra Large Equipment of the Next Generation

Ultra Large Clean Room
In addition to three middle to large size clean rooms, our factory is equipped with an ultra large clean room corresponding 8th to 10th generation. In the clean room air cleanliness class regarding particle and bacteria is kept better than the set level. Our factory is fully equipped with clean rooms satisfying requirements for production of the next generation systems.


Introduction of Facilities

In order to meet a wide variety of customer's requirements vacuum systems and parts customer requires, our factory is equipped with many kinds of facilities and devices. Our tools and facilities


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